"Reliability evaluation of micromirror of double S-shaped unimorph ..."

Wenjing Liu, Yongming Tang, Baoping Wang (2013)

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DOI: 10.1109/NEMS.2013.6559849

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-17

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Wenjing Liu, Yongming Tang, Baoping Wang:
Reliability evaluation of micromirror of double S-shaped unimorph piezoelectric actuator with probabilistic approach. NEMS 2013: 813-816

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