"Design of Piezoelectric Micro-Actuators Based on LiNbO3 Thin Film."

Yushuai Liu et al. (2021)

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DOI: 10.1109/NEMS51815.2021.9451448

access: closed

type: Conference or Workshop Paper

metadata version: 2021-06-28

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Yushuai Liu, Zhiyuan Gao, Kangfu Liu, Tao Wu:
Design of Piezoelectric Micro-Actuators Based on LiNbO3 Thin Film. NEMS 2021: 1545-1549

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