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"Design, fabrication and characterization of a single-chip ..."
Biyun Ling et al. (2017)
- Biyun Ling, Yu Wang, Chunrong Peng, Bing Li, Zhaozhi Chu, Bin Li, Shanhong Xia:
Design, fabrication and characterization of a single-chip three-dimensional electric field microsensor. NEMS 2017: 307-310
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