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"WO3 nanoparticle with MEMS technology improve the sensing response by ..."

Chih-Hung Lin, Shoou-Jinn Chang, Ting-Jen Hsueh (2017)

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DOI: 10.1109/NEMS.2017.8017003

access: closed

type: Conference or Workshop Paper

metadata version: 2017-09-07

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Chih-Hung Lin, Shoou-Jinn Chang, Ting-Jen Hsueh:
WO3 nanoparticle with MEMS technology improve the sensing response by HWCVD system. NEMS 2017: 190-193

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