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"Controllable elastocapillary folding of silicon nitride 3D structures by ..."

Antoine Legrain et al. (2013)

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DOI: 10.1109/NEMS.2013.6559787

access: closed

type: Conference or Workshop Paper

metadata version: 2021-09-23

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Antoine Legrain, T. G. Janson, J. W. Berenschot, Gijs J. M. Krijnen, Leon Abelmann, Niels R. Tas:
Controllable elastocapillary folding of silicon nitride 3D structures by through-wafer filling. NEMS 2013: 538-541

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