"The application of a new beam-rigid body MEMS gyroscope in the ..."

S. Amir Mousavi Lajimi, Glenn R. Heppler, Eihab M. Abdel-Rahman (2014)

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DOI: 10.1109/NEMS.2014.6908880

access: closed

type: Conference or Workshop Paper

metadata version: 2021-09-23

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S. Amir Mousavi Lajimi, Glenn R. Heppler, Eihab M. Abdel-Rahman:
The application of a new beam-rigid body MEMS gyroscope in the frequency-modulation mode. NEMS 2014: 586-591

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