"Optimum electrostatic force control for fabricating a hybrid UV-curable ..."

Kuo-Yung Hung et al. (2010)

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DOI: 10.1109/NEMS.2010.5592417

access: closed

type: Conference or Workshop Paper

metadata version: 2018-11-02

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Kuo-Yung Hung, Liang-Wei Chang, Fan-Gang Tseng, Nguyen Thi Minh Hang:
Optimum electrostatic force control for fabricating a hybrid UV-curable aspheric lens. NEMS 2010: 404-408

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