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"A differential capacitive sensing circuit for micro-machined ..."

Jung-Tang Huang, Kai-Si Chen, Chu-Che Chien (2011)

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DOI: 10.1109/NEMS.2011.6017511

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-17

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Jung-Tang Huang, Kai-Si Chen, Chu-Che Chien:
A differential capacitive sensing circuit for micro-machined omnidirectional microphone. NEMS 2011: 948-951

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