"Microelectroforming of a nickel nozzle plate featured with anti-stiction ..."

Jheng-Jhih Huang, Chin-Tai Chen (2013)

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DOI: 10.1109/NEMS.2013.6559777

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-17

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Jheng-Jhih Huang, Chin-Tai Chen:
Microelectroforming of a nickel nozzle plate featured with anti-stiction for a piezoelectric atomizer. NEMS 2013: 490-493

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