"A method to reduce notching effect on the anchors of a micro-gyroscope."

Peizhen Hong et al. (2011)

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DOI: 10.1109/NEMS.2011.6017362

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-17

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Peizhen Hong, Zhongyang Guo, Zhenchuan Yang, Guizhen Yan:
A method to reduce notching effect on the anchors of a micro-gyroscope. NEMS 2011: 338-341

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