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"A High-Selectivity HNA Etching System for Bulk Micromachined Deep Holes ..."
Taotao Guan et al. (2018)
- Taotao Guan, Fang Yang, Wei Wang, Peng Liu, Zexin Fan, Leijian Cheng, Zikun Chen, Runze Yu, Qiancheng Zhao, Wei Wang, Dacheng Zhang:
A High-Selectivity HNA Etching System for Bulk Micromachined Deep Holes with High Roundness. NEMS 2018: 397-400
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