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"A novel MEMS force sensor based on Laterally Movable Gate Array Field ..."

Wendi Gao et al. (2017)

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DOI: 10.1109/NEMS.2017.8017122

access: closed

type: Conference or Workshop Paper

metadata version: 2023-11-10

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  - conf/nems/GaoZJXGZZS17
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  - https://dblp.org/rec/conf/nems/GaoZJXGZZS17
Wendi Gao, Libo Zhao, Zhuangde Jiang, Yong Xia, Xin Guo, Zhiming Zhao, Yulong Zhao, Dong Sun:
A novel MEMS force sensor based on Laterally Movable Gate Array Field Effect Transistor(LMGAFET). NEMS 2017: 723-727

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