BibTeX record conf/nems/FanZ09

download as .bib file

@inproceedings{DBLP:conf/nems/FanZ09,
  author    = {Xuejiao Fan and
               Dacheng Zhang},
  title     = {Parameter characterization of anodic bonded electrical interconnect
               in {MEMS/NEMS} devices},
  booktitle = {{NEMS}},
  pages     = {198--201},
  publisher = {{IEEE} Computer Society},
  year      = {2009}
}
a service of Schloss Dagstuhl - Leibniz Center for Informatics