BibTeX record conf/nems/FanZ09

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@inproceedings{DBLP:conf/nems/FanZ09,
  author    = {Xuejiao Fan and
               Dacheng Zhang},
  title     = {Parameter characterization of anodic bonded electrical interconnect
               in {MEMS/NEMS} devices},
  booktitle = {4th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {IEEE-NEMS} 2009, Shenzhen, China, January 5-8, 2009},
  pages     = {198--201},
  publisher = {{IEEE} Computer Society},
  year      = {2009},
  url       = {https://doi.org/10.1109/NEMS.2009.5068558},
  doi       = {10.1109/NEMS.2009.5068558},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/FanZ09.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
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