"A SOI-MEMS atmosphere pressure sensor and its low stress packaging."

Lidong Du et al. (2014)

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DOI: 10.1109/NEMS.2014.6908848

access: closed

type: Conference or Workshop Paper

metadata version: 2024-02-05

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Lidong Du, Mengying Zhang, Zhan Zhao, Liang Li, Cheng Liu, Zhen Fang, Shaohua Wu, Xuejin Sun, Xiaolei Wang:
A SOI-MEMS atmosphere pressure sensor and its low stress packaging. NEMS 2014: 454-457

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