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"A complete analytical model for square diaphragm capacitive sensor with ..."

Farah Deeba, Shahed Khan Mohammed, Md. Shofiqul Islam (2013)

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DOI: 10.1109/NEMS.2013.6559956

access: closed

type: Conference or Workshop Paper

metadata version: 2023-09-30

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Farah Deeba, Shahed Khan Mohammed, Md. Shofiqul Islam:
A complete analytical model for square diaphragm capacitive sensor with clamped edge. NEMS 2013: 1311-1314

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