"Structure design on MEMS TiN resonant pressure sensors."

Yang Chuan, Guo Can (2010)

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DOI: 10.1109/NEMS.2010.5592131

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-17

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Yang Chuan, Guo Can:
Structure design on MEMS TiN resonant pressure sensors. NEMS 2010: 30-33

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