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"A triaxial monolithic silicon accelerometer with improved temperature ..."
Peng Chen et al. (2013)
- Peng Chen, Dingbang Xiao, Zhihua Chen, Ye Yuan, Xinghua Wang, Songqi Hu, Yulie Wu:
A triaxial monolithic silicon accelerometer with improved temperature characteristics. NEMS 2013: 1006-1009
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