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"Modeling and characterization of thin film polysilicon in thermally driven ..."

Shahabeddin Vamegh Estahbanati, Maher Bakri-Kassem, Rached Dhaouadi (2016)

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DOI: 10.1109/MWSCAS.2016.7870071

access: closed

type: Conference or Workshop Paper

metadata version: 2021-10-14

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  dblp key:
  - conf/mwscas/EstahbanatiBD16
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  - https://dblp.org/rec/conf/mwscas/EstahbanatiBD16
Shahabeddin Vamegh Estahbanati, Maher Bakri-Kassem, Rached Dhaouadi:
Modeling and characterization of thin film polysilicon in thermally driven MEMS actuators. MWSCAS 2016: 1-4

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