"Modular model-based supervisory controller design for wafer logistics in ..."

Bram van der Sanden et al. (2015)

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DOI: 10.1109/MODELS.2015.7338273

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-23

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Bram van der Sanden, Michel A. Reniers, Marc Geilen, Twan Basten, Johan Jacobs, Jeroen Voeten, Ramon R. H. Schiffelers:
Modular model-based supervisory controller design for wafer logistics in lithography machines. MoDELS 2015: 416-425

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