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"In-situ Measurement of Residual Stress and Thermal Deformation of ..."
Cheng-Lun Kan et al. (2022)
- Cheng-Lun Kan, Han-San Xie, Chao-Ching Ho, Ching-Yuan Chang:
In-situ Measurement of Residual Stress and Thermal Deformation of Substrate after Laser Drilling. MESA 2022: 1-5
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