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"Novel Optical Probing System with Submicron Spatial Resolution for ..."
Kazuyuki Ozaki et al. (1996)
- Kazuyuki Ozaki, Hidenori Sekiguchi, Shinichi Wakana, Yoshiro Goto, Yasutoshi Umehara, Jun Matsumoto:

Novel Optical Probing System with Submicron Spatial Resolution for Internal Diagnosis of VLSI Circuits. ITC 1996: 269-275

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