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"Minimization of Flare in EUVL by Simultaneous Wire Segment Perturbation ..."

Sudipta Paul, Pritha Banerjee, Susmita Sur-Kolay (2019)

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DOI: 10.1109/ISVLSI.2019.00047

access: closed

type: Conference or Workshop Paper

metadata version: 2023-09-02

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  dblp key:
  - conf/isvlsi/0001BS19
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Sudipta Paul, Pritha Banerjee, Susmita Sur-Kolay:
Minimization of Flare in EUVL by Simultaneous Wire Segment Perturbation and Dummification. ISVLSI 2019: 212-217

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