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"An Integrated Gravimetric FBAR Circuit for Operation in Liquids Using a ..."

Marcin K. Augustyniak et al. (2007)

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DOI: 10.1109/ISSCC.2007.373459

access: closed

type: Conference or Workshop Paper

metadata version: 2023-09-30

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Marcin K. Augustyniak, W. Weber, Gottfried Beer, Hans Mulatz, L. Elbrecht, H.-J. Timme, Marc Tiebout, Werner Simbürger, Christian Paulus, Björn Eversmann, Doris Schmitt-Landsiedel, Roland Thewes, Ralf Brederlow:
An Integrated Gravimetric FBAR Circuit for Operation in Liquids Using a Flip-Chip Extended 0.13μm CMOS Technology. ISSCC 2007: 392-610

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