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"Towards ultra-dense arrays of VHF NEMS with FDSOI-CMOS active pixels for ..."
Gregory Arndt et al. (2012)
- Gregory Arndt, Cecilia Dupre, Julien Arcamone
, Gerald Cibrario, Olivier Rozeau, Laurent Duraffourg
, Eric Ollier, Éric Colinet:
Towards ultra-dense arrays of VHF NEMS with FDSOI-CMOS active pixels for sensing applications. ISSCC 2012: 320-322
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