"The impact of BEOL lithography effects on the SRAM cell performance and yield."

Nancy Ying Zhou et al. (2009)

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DOI: 10.1109/ISQED.2009.4810363

access: closed

type: Conference or Workshop Paper

metadata version: 2024-06-04

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Nancy Ying Zhou, Rouwaida Kanj, Kanak Agarwal, Zhuo Li, Rajiv V. Joshi, Sani R. Nassif, Weiping Shi:
The impact of BEOL lithography effects on the SRAM cell performance and yield. ISQED 2009: 607-612

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