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"Metal Inter-layer Via Keep-out-zone in M3D IC: A Critical Process-aware ..."

Madhava Sarma Vemuri, Umamaheswara Rao Tida (2023)

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DOI: 10.1109/ISQED57927.2023.10129285

access: closed

type: Conference or Workshop Paper

metadata version: 2023-06-01

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  - conf/isqed/VemuriT23
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Madhava Sarma Vemuri, Umamaheswara Rao Tida:
Metal Inter-layer Via Keep-out-zone in M3D IC: A Critical Process-aware Design Consideration. ISQED 2023: 1-8

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