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"Overview and development of EDA tools for integration of DSA into ..."

J. Andres Torres et al. (2017)

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DOI: 10.1109/ISQED.2017.7918300

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-11

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  - conf/isqed/TorresFKMGKMKA17
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J. Andres Torres, Germain Fenger, Daman Khaira, Yuansheng Ma, Yuri Granik, Chris Kapral, Joydeep Mitra, Polina Krasnova, Dehia Ait-Ferhat:
Overview and development of EDA tools for integration of DSA into patterning solutions. ISQED 2017: 99-103

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