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"Self-aligned double patterning (SADP) layout decomposition."

Minoo Mirsaeedi, J. Andres Torres, Mohab H. Anis (2011)

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DOI: 10.1109/ISQED.2011.5770711

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-25

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  - conf/isqed/MirsaeediTA11
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Minoo Mirsaeedi, J. Andres Torres, Mohab H. Anis:
Self-aligned double patterning (SADP) layout decomposition. ISQED 2011: 103-109

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