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"Evaluating the benefits of relaxed BEOL pitch for deeply scaled ICs."

Mehmet Meric Isgenc et al. (2017)

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DOI: 10.1109/ISQED.2017.7918313

access: closed

type: Conference or Workshop Paper

metadata version: 2019-10-19

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  dblp key:
  - conf/isqed/IsgencPLP17
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  - https://dblp.org/rec/conf/isqed/IsgencPLP17
Mehmet Meric Isgenc, Samuel Pagliarini, Renzhi Liu, Larry T. Pileggi:
Evaluating the benefits of relaxed BEOL pitch for deeply scaled ICs. ISQED 2017: 180-185

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