"Performance Driven OPC for Mask Cost Reduction."

Puneet Gupta et al. (2005)

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DOI: 10.1109/ISQED.2005.93

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-23

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Puneet Gupta, Andrew B. Kahng, Dennis Sylvester, Jie Yang:
Performance Driven OPC for Mask Cost Reduction. ISQED 2005: 270-275

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