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"SUALD: Spacing uniformity-aware layout decomposition in triple patterning ..."

Zihao Chen, Hailong Yao, Yici Cai (2013)

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DOI: 10.1109/ISQED.2013.6523667

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-25

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Zihao Chen, Hailong Yao, Yici Cai:
SUALD: Spacing uniformity-aware layout decomposition in triple patterning lithography. ISQED 2013: 566-571

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