"A Cell-Based Row-Structure Layout Decomposer for Triple Patterning ..."

Hsi-An Chien et al. (2015)

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DOI: 10.1145/2717764.2717768

access: closed

type: Conference or Workshop Paper

metadata version: 2018-11-06

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Hsi-An Chien, Szu-Yuan Han, Ye-Hong Chen, Ting-Chi Wang:
A Cell-Based Row-Structure Layout Decomposer for Triple Patterning Lithography. ISPD 2015: 67-74

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