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"A Review Study on ML-based Methods for Defect-Pattern Recognition in Wafer ..."

Theodosis Theodosiou et al. (2023)

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DOI: 10.1016/J.PROCS.2022.12.253

access: closed

type: Conference or Workshop Paper

metadata version: 2024-02-05

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  - conf/ism2/TheodosiouRPTPD23
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Theodosis Theodosiou, Aikaterini Rapti, Konstantinos Papageorgiou, Theodoros Tziolas, Elpiniki Papageorgiou, Nikolaos Dimitriou, George Margetis, Dimitrios Tzovaras:
A Review Study on ML-based Methods for Defect-Pattern Recognition in Wafer Maps. ISM 2023: 570-583

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