"Microelectromechanical systems in 3D SOI-CMOS: sensing electronics ..."

Francisco Tejada, Andreas G. Andreou (2006)

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DOI: 10.1109/ISCAS.2006.1693746

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-26

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Francisco Tejada, Andreas G. Andreou:
Microelectromechanical systems in 3D SOI-CMOS: sensing electronics embedded in mechanical structures. ISCAS 2006

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