"High-sensitivity capacitive readout system for resonant ..."

Gabriel Abadal et al. (2005)

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DOI: 10.1109/ISCAS.2005.1465559

access: closed

type: Conference or Workshop Paper

metadata version: 2021-04-09

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Gabriel Abadal, Jaume Verd, Jordi Teva, Arantxa Uranga, Núria Barniol, Jaume Esteve, Marta Duch, Francesc Pérez-Murano:
High-sensitivity capacitive readout system for resonant submicrometer-scale cantilevers based sensors. ISCAS (5) 2005: 4209-4212

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