"Reliability Improvement with Optimized BEOL Process in Advanced DRAM."

J. H. Lee et al. (2023)

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DOI: 10.1109/IRPS48203.2023.10118168

access: closed

type: Conference or Workshop Paper

metadata version: 2023-05-24

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J. H. Lee, B. W. Woo, Y. M. Lee, N. H. Lee, S. H. Lee, Y. S. Lee, H. S. Kim, S. Pae:
Reliability Improvement with Optimized BEOL Process in Advanced DRAM. IRPS 2023: 1-4

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