"Method to assess the impact of LER and spacing variation on BEOL ..."

Deniz Kocaay et al. (2018)

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DOI: 10.1109/IRPS.2018.8353670

access: closed

type: Conference or Workshop Paper

metadata version: 2019-01-22

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Deniz Kocaay, Philippe Roussel, Kristof Croes, Ivan Ciofi, Alicja Lesniewska, Ingrid De Wolf:
Method to assess the impact of LER and spacing variation on BEOL dielectric reliability using 2D-field simulations for <20nm spacing. IRPS 2018: 10-1

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