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"Time Dependent Dielectric Breakdown of Cobalt and Ruthenium Interconnects ..."

H. Huang et al. (2019)

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DOI: 10.1109/IRPS.2019.8720528

access: closed

type: Conference or Workshop Paper

metadata version: 2023-09-08

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H. Huang, P. S. McLaughin, James J. Kelly, C.-C. Yang, Richard G. Southwick, M. Wang, Griselda Bonilla, Gauri Karve:
Time Dependent Dielectric Breakdown of Cobalt and Ruthenium Interconnects at 36nm Pitch. IRPS 2019: 1-5

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