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"The Enhancement Mechanisms of SiOx Hardness via Manipulation of Oxygen ..."

Hwanbeom Cho et al. (2024)

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DOI: 10.1109/IRPS48228.2024.10529456

access: closed

type: Conference or Workshop Paper

metadata version: 2024-05-29

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  dblp key:
  - conf/irps/ChoKKASOKKPJKHLLLK24
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  persistent URL:
  - https://dblp.org/rec/conf/irps/ChoKKASOKKPJKHLLLK24
Hwanbeom Cho, Kyeongeun Kim, Minkyoung Kim, Chinam An, Noeul Sim, Youngseok Oh, Minseung Kim, Gyumyeong Kim, Jinkyung Park, Jin Jeon, Minjin Kim, Eunae Heo, Youngju Lim, Moonhyun Lee, Sanghee Lee, Minji Kim:
The Enhancement Mechanisms of SiOx Hardness via Manipulation of Oxygen Content. IRPS 2024: 10

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