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"The Role of Defects and Interface Degradation on Ferroelectric HZO ..."

Lorenzo Benatti et al. (2023)

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DOI: 10.1109/IRPS48203.2023.10118229

access: closed

type: Conference or Workshop Paper

metadata version: 2023-06-26

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Lorenzo Benatti, Sara Vecchi, Milan Pesic, Francesco Maria Puglisi:
The Role of Defects and Interface Degradation on Ferroelectric HZO Capacitors Aging. IRPS 2023: 1-6

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