"Low-PBTS defect-engineered high-mobility metal-oxide BEOL transistors."

Bastien Beltrando et al. (2024)

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DOI: 10.1109/IRPS48228.2024.10529484

access: closed

type: Conference or Workshop Paper

metadata version: 2024-07-08

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Bastien Beltrando, Bruno Coppolelli, Jung-Bae Kim, Yang Ho Bae, Stephen Weeks, Lisa Enman, Ghazal Saheli, Davide Cornigli, Stuart Brinkley, Mark Saly, Luca Larcher, Dong Kil Yim, Milan Pesic:
Low-PBTS defect-engineered high-mobility metal-oxide BEOL transistors. IRPS 2024: 4

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