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"Electrostatic actuation of surface/bulk micromachined single-crystal ..."
Sangwoo Lee et al. (1999)
- Sangwoo Lee, Sangjun Park, Sangwoo Yi, Sangchul Lee, Dong-Il Dan Cho, Byeoungju Ha, Yongsoo Oh, Cimoo Song:
Electrostatic actuation of surface/bulk micromachined single-crystal silicon microresonators. IROS 1999: 1057-1062
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