"Computation of proximity effect corrections in electron beam lithography ..."

Robert C. Frye, Edward A. Rietman, Kevin D. Cummings (1990)

> Home

Details and statistics

DOI: 10.1109/IJCNN.1990.137536

access: closed

type: Conference or Workshop Paper

metadata version: 2018-01-29

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - conf/ijcnn/FryeRC90
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/conf/ijcnn/FryeRC90
Robert C. Frye, Edward A. Rietman, Kevin D. Cummings:
Computation of proximity effect corrections in electron beam lithography by a neural network. IJCNN 1990: 7-14

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.