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"Parallel Packaging of Micro Electro Mechanical Systems (MEMS) Using ..."

Jens Taprogge et al. (2012)

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DOI: 10.1007/978-3-642-28163-1_4

access: open

type: Conference or Workshop Paper

metadata version: 2018-06-26

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  - conf/ifip5-5/TaproggeBSN12
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Jens Taprogge, Felix Beyeler, Alexander Steinecker, Bradley J. Nelson:
Parallel Packaging of Micro Electro Mechanical Systems (MEMS) Using Self-alignment. IPAS 2012: 28-35

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