"Fabrication of silicon nanowire pH sensors using high output, low cost ..."

Kun Zhou, Zhida Zhao, Zheyao Wang (2017)

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DOI: 10.1109/ICSENS.2017.8233921

access: closed

type: Conference or Workshop Paper

metadata version: 2022-12-15

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Kun Zhou, Zhida Zhao, Zheyao Wang:
Fabrication of silicon nanowire pH sensors using high output, low cost sidewall mask technology. IEEE SENSORS 2017: 1-3

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