"A MEMS inertial switch with compact constraint structures for lowering ..."

Qihuan Zhang et al. (2016)

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DOI: 10.1109/ICSENS.2016.7808428

access: closed

type: Conference or Workshop Paper

metadata version: 2022-12-28

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Qihuan Zhang, Zhuoqing Yang, Qiu Xu, Mengyuan Zhao, Jinyuan Yao, Guifu Ding, Xiaolin Zhao:
A MEMS inertial switch with compact constraint structures for lowering off-axis sensitivity. IEEE SENSORS 2016: 1-3

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