"A 2D resonant MEMS scanner with an ultra-compact wedge-like multiplied ..."

Liangchen Ye et al. (2016)

Details and statistics

DOI: 10.1109/ICSENS.2016.7808932

access: closed

type: Conference or Workshop Paper

metadata version: 2024-02-09

a service of  Schloss Dagstuhl - Leibniz Center for Informatics