"Resonance Frequency and Vibration Mode Modification of Piezoelectric MEMS ..."

Kaoru Yamashita, Junpei Yamamoto, Zhengxin Yi (2023)

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DOI: 10.1109/SENSORS56945.2023.10325223

access: closed

type: Conference or Workshop Paper

metadata version: 2023-12-14

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Kaoru Yamashita, Junpei Yamamoto, Zhengxin Yi:
Resonance Frequency and Vibration Mode Modification of Piezoelectric MEMS Ultrasonic Sensors on Buckled Diaphragm Structures for High Sensitivity and High Resolution Measurement. SENSORS 2023: 1-3

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