"Vibration Mode of MEMS Ultrasonic Sensors on Buckled Diaphragms with ..."

Kaoru Yamashita et al. (2019)

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DOI: 10.1109/SENSORS43011.2019.8956622

access: closed

type: Conference or Workshop Paper

metadata version: 2022-12-16

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Kaoru Yamashita, Hikaru Hibino, Tomoki Nishioka, Minoru Noda, Paul Muralt:
Vibration Mode of MEMS Ultrasonic Sensors on Buckled Diaphragms with Piezoelectric Resonance Frequency Modification. IEEE SENSORS 2019: 1-4

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